Customized OEM solutions for MOCVD
LayTec offers OEM metrology tools that can be fully integrated into MOCVD systems and deliver comprehensive feedback control mass manufacturing. Several measurement heads simultaneously “keep an eye” on every wafer ring and all heater zones. Customer’s benefits:
- increased reproducibility and yield
- shorter cycle times
- fast calibration
- smooth communication with the growth system.
Here are some examples:
EpiSmart® ECP is an advanced temperature sensor for Top-Side Temperature Control (TTC) in deposition process systems (e.g. epitaxial growth systems). It consists of a base unit and, depending on the reactor, up to five measurement heads. Typically, one measurement head per heater zone is installed. For further detailed information please check ourEpiSmart ECP Data Sheet.
